John Wiley & Sons EUV Lithography Cover EUVL is an area of intense research and this book provides the foundation required for understanding.. Product #: 978-0-470-47155-5 Regular price: $129.91 $129.91 In Stock

EUV Lithography

Bakshi, Vivek

Cover

1. Edition January 2009
702 Pages, Hardcover
Professional Book

ISBN: 978-0-470-47155-5
John Wiley & Sons

Short Description

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.