John Wiley & Sons EUV Lithography Cover EUVL is an area of intense research and this book provides the foundation required for understanding.. Product #: 978-0-470-47155-5 Regular price: $129.91 $129.91 Auf Lager

EUV Lithography

Bakshi, Vivek

Cover

1. Auflage Januar 2009
702 Seiten, Hardcover
Fachbuch

ISBN: 978-0-470-47155-5
John Wiley & Sons

Kurzbeschreibung

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.